计算全息用于非球面检测的研究.pdf

10　 2 Vol.10 N o.2 　 　 2005 4 JOURNAL HARB IN UN IV. SCI. TECH. 　Apr., 2005 　　　　　　 1 2 乔玉晶, 　吕　宁 (1. , 150080; 2. , , 150080) 　:为了实现对非球面的高精确度检测, 提出, 采用计算全息补偿干涉测量原理检测二 旋转对称非球面, 分析了检测光路, 推导出全息图条纹位置计算公式, 得到了用于非球面检测的计 算全息图样, 并对测量光路进行了仿真分析, 结果表明, 计算全息补偿干涉测量法测量的均方差值 比传统的干涉测量法小. :计算全息;补偿干涉测量;波函数 :TP391.413 :A :1007-2 83(2005)02- 0097- 03 The Resea rch of CGH fo r Test ing A spheric Surface 1 2 QIAO Yu -j ing , 　LU N ing (1. M echanicalPow er Engineering College, Harbin Univ. Sci. Tech., H arbin 150080, China; 2. Com puterControlCollege, H arbin Univ. Sci. Tech., H arbin 150080, China) Ab stract:For testing aspheric surface more p recisely, the authors present the computer generated hologram (CGH )used for testing aspheric surface, and analyze the optical path that is used for testing aspheric surface, dedu ing the position of CGH stripes for testing binary axially symmetric aspheric surface, and obtaining the CGH pattern equation. A ccord ing to the research resu l,t the authors smi ulate and analyze the optical testing path. The resu lt of smi ulation show s the testing method of CGH compensating for d iffraction can measure the aspheric surface w ith the higher precision than conventionalmethod, and the RMS is less. K ey w ord s:CGH;compensate diffraction measuremen;t w ave function 　　 . , . . , [1, 2] Twyman -G re