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4.1.4. The TEM Operation
4.1.4.1. THE ILLUMINATION
SYSTEM
We will discuss the two different
ways to use the illumination system:
well refer to these as forming a
parallel beam (it is almost never truly
parallel)
or a convergent beam.
4.1.4.1.A. TEM Operation Using a
Parallel Beam
A B
Figure 4.1.4.1. Parallel-beam operation in the TEM (A) using just the C1 and
an underfocused C2 lens and (B) using the C1 and C2 lenses to image the
source at the front focal plane of the upper objective lens.
4.1.4.1.B. Convergent-Beam
(S)TEM Mode
The convergent beam is a probe.
We use such a probe when we want
to localize the signals coming from
the specimen, as in microanalysis
or convergent-beam (also known as
micro or nano) diffraction.
Figure 4.1.4.2. Effect of the C2 aperture on the parallel nature of
the beam: a smaller aperture creates a more parallel beam.
Figure 4.1.4.3. A focused C2 lens illuminates a small area of the
specimen with a nonparallel beam.
Figure 4.1.4.4. Use of the objective polepiece as a third condenser lens
(also called a condenser-objective, or C3, lens) gives the smallest
possible probe and large convergence angles. The large u/v ratio gives
the maximum demagnification of the image of the gun crossover.
Figure 4.1.4.5. Effect of the CI lens strength on probe size: a
stronger C1 lens (A) results in greater demagnification by any
subsequent lens (C2 or C3), giving a smaller electron beam at
the specimen. A weaker lens (B) gives a broader probe.
4.1.4.1.C. Translating and
Tilting the Beam
Figure 4.1.4.6. The use of pre-specimen scan
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