a high sensitivity three-dimensional-shape sensing patch prepared by lithography and inkjet printing高灵敏度three-dimensional-shape传感片由光刻技术和喷墨打印.pdfVIP

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a high sensitivity three-dimensional-shape sensing patch prepared by lithography and inkjet printing高灵敏度three-dimensional-shape传感片由光刻技术和喷墨打印.pdf

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a high sensitivity three-dimensional-shape sensing patch prepared by lithography and inkjet printing高灵敏度three-dimensional-shape传感片由光刻技术和喷墨打印

Sensors 2012, 12, 4172-4186; doi:10.3390/s120404172 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A High Sensitivity Three-Dimensional-Shape Sensing Patch Prepared by Lithography and Inkjet Printing 1 1 1 2 1 Yi-Ren Huang , Sheng-An Kuo , Michal Stach , Chia-Hsing Liu , Kuan-Hsun Liao and Cheng-Yao Lo 1,* 1 Institute of NanoEngineering and MicroSystems, National Tsing Hua University, No. 101, Section 2, Kuang Fu Road, Hsin Chu 30013, Taiwan; E-Mails: yrhuangsun@ (Y.-R.H.); ksa0928@ (S.-A.K.); stasekcz@seznam.cz (M.S.); s9935804@.tw (K.-H.L.) 2 Department of Power Mechanical Engineering, National Tsing Hua University, No. 101, Section 2, Kuang Fu Road, Hsin Chu 30013, Taiwan; E-Mail: caspar.rush@ * Author to whom correspondence should be addressed; E-Mail: chengyao@.tw; Tel.: +886-3-5162-404; Fax: +886-3-5745-454. Received: 28 February 2012; in revised form: 16 March 2012 / Accepted: 16 March 2012 / Published: 28 March 2012 Abstract: A process combining conventional photolithography and a novel inkjet printing method for the manufacture of high sensitivity three-dimensional-shape (3DS) sensing patches was proposed and demonstrated. The supporting curvature ranges from −2 −1 1.41 to 6.24 × 10 mm and the sensing patch has a thickness of less than 130 μm and 20 × 20 mm2 dimensions. A complete finite element m