原创力文档a mems-based flow rate and flow direction sensing platform with integrated temperature compensation schememems-based流量和流向传感平台与集成温度补偿方案.pdfVIP
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a mems-based flow rate and flow direction sensing platform with integrated temperature compensation schememems-based流量和流向传感平台与集成温度补偿方案
Sensors 2009, 9, 5460-5476; doi:10.3390/
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
A MEMS-Based Flow Rate and Flow Direction Sensing
Platform with Integrated Temperature Compensation Scheme
Rong-Hua
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