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a mems-based benzene gas sensor with a self-heating wo3 sensing layermems-based苯气体传感器和自热wo3传感层.pdf

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a mems-based benzene gas sensor with a self-heating wo3 sensing layermems-based苯气体传感器和自热wo3传感层

Sensors 2009, 9, 2895-2906; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article A MEMS-based Benzene Gas Sensor with a Self-heating WO3 Sensing Layer Ming-Tsun Ke 1, Mu-Tsun Lee 1, Chia-Yen Lee 2,* and Lung-Ming Fu 2,* 1 Department of Energy and Refrigerating Air-conditioning Engineering, National Taipei University of Technology, Taiwan, Taiwan 106; E-Mails: mtke@.tw (M.-T.K.); me586032037@ (M.-T.L.) 2 Department of Materials Engineering, National Pingtung University of Science and Technology, Pingtung, Taiwan 912 * Author to whom correspondence should be addressed; E-Mails: leecy@mail. .tw (C.- Y.L.); loudyfu@.tw (L.-M.F.); Tel. +886-8-7703202 (Ext.: 7561/7553); Fax: +886-8-7740552 Received: 31 March 2009; in revised form: 17 April 2009 / Accepted: 21 April 2009 / Published: 21 April 2009 Abstract: In the study, a MEMS-based benzene gas sensor is presented, consisting of a quartz substrate, a thin-film WO3 sensing layer, an integrated Pt micro-heater, and Pt interdigitated electrodes (IDEs). When benzene is present in the atmosphere, oxidation occurs on the heated WO3 sensing layer. This causes a change in the electrical conductivity of the WO3 film, and hence changes the resistance between the IDEs. The benzene concentration is then computed from the change in the measured resistance. A specific orientation of the WO3 layer is obtained by optimizing the sputtering process parameters. It is found t