analytical modeling for the bending resonant frequency of multilayered microresonators with variable cross-section硅微谐振器微弱谐振分析建模的多层弯曲共振频率与可变截面.pdfVIP

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analytical modeling for the bending resonant frequency of multilayered microresonators with variable cross-section硅微谐振器微弱谐振分析建模的多层弯曲共振频率与可变截面.pdf

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analytical modeling for the bending resonant frequency of multilayered microresonators with variable cross-section硅微谐振器微弱谐振分析建模的多层弯曲共振频率与可变截面

Sensors 2011, 11, 8203-8226; doi:10.3390/s110908203 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Analytical Modeling for the Bending Resonant Frequency of Multilayered Microresonators with Variable Cross-Section A

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