以电浆化学气相沉积DLC薄膜在氮氧化处理V4E高钒工具钢之研究.PDF

以電漿化學氣相沉積DLC薄膜在氮氧化處 理V4E高釩工具鋼之研究 A Study on the Use of PECVD DLC Film in Oxynitriding-Treated V4E High Vanadium Tool Steel 1 2 3 4 S.H. Chang, C.K. Peng, C.M. Liu, W.C. Wu V4E A ft er oxyn itr i din g -tr eatm en t o f V 4 E h igh vanadium tool steel, the diamond-like carbon (DLC) film was coated on the steel by DC-pulsed PECVD. (-15+ 10%) We studied many maj or parameters affecting the DC- CH4 pulsed PECVD coating including the CH4 gas flow rate (5 15 25 35 sccm) (5, 15, 25 and 35 sccm) with an unbalanced bipolar- V4E pulsed volt age (- 15+ 10%) . Ram an sp ectr oscopy analysis, wear tests, hardness tests, and corrosion resistance inspections were conducted to compare the CH4 properties of the DLC films and the oxynitriding/DLC 35 sccm DLC treated V4E high vanadium tool steel. As the CH4 gas 4.4 µm flow rate increased to 35 sccm, the film deposition rate increased and the DLC thickness increased to 400 mW·cm-2 4.4 µm. When the CH4 gas flow rate was 5 sccm and 90 CH4 5 sccm the deposition time was 90 min, the duplex coating layers had optimal properties when DLC films were treated by a unipolar negative-pulsed voltage with ( 1.96 N 4.9 N power intensity 400 mW cm-2 . It had the lowest wear 6.23 10-3 mm3 1.19 10-2 volume loss (when the load of 1.96 N and 4.9 N was 3 -3 3 -2 3 mm ) DLC 6.23 10 mm and 1.19 10 mm , respectiv