development of x-y servo pneumatic-piezoelectric hybrid actuators for position control with high response, large stroke and nanometer accuracyx - y位置控制伺服pneumatic-piezoelectric混合执行机构的发展具有高响应,大中风和纳米精度.pdfVIP

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development of x-y servo pneumatic-piezoelectric hybrid actuators for position control with high response, large stroke and nanometer accuracyx - y位置控制伺服pneumatic-piezoelectric混合执行机构的发展具有高响应,大中风和纳米精度.pdf

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development of x-y servo pneumatic-piezoelectric hybrid actuators for position control with high response, large stroke and nanometer accuracyx - y位置控制伺服pneumatic-piezoelectric混合执行机构的发展具有高响应,大中风和纳米精度

Sensors 2010, 10, 2675-2693; doi:10.3390/s100402675 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Development of X-Y Servo Pneumatic-Piezoelectric Hybrid Actuators for Position Control with High Response, Large Stroke and Nanometer Accuracy Mao-Hsiung Chiang Department of Engineering Science and Ocean Engineering, National Taiwan University, No.1, Sec. 4, Roosevelt Rd., Taipei 10617, Taiwan; E-Mail: mhchiang@.tw; Tel.: +882-2-3366 3730; Fax: +882-2-3366 3730 Received: 13 January 2010; in revised form: 28 January 2010 / Accepted: 2 March 2010 / Published: 25 March 2010 Abstract: This study aims to develop a X-Y dual-axial intelligent servo pneumatic- piezoelectric hybrid actuator for position control with high response, large stroke (250 mm, 200 mm) and nanometer accuracy (20 nm). In each axis, the rodless pneumatic actuator serves to position in coarse stroke and the piezoelectric actuator compensates in fine stroke. Thus, the overall control systems of the single axis become a dual-input single-output (DISO) system. Although the rodless pneumatic actuator has relatively larger friction force, it has the advantage of mechanism for multi-axial development. Thus, the X-Y dual-axial positioning system is developed based on the servo pneumatic-piezoelectric hybrid actuator. In addition, the decoupling self-organizing fuzzy sliding mode control is developed as the intelligent control strategies. Finally, the proposed novel intelligen