performance of a diaphragmed microlens for a packaged microspectrometer隔膜的性能打包显微分光计的显微镜头.pdf

Sensors 2009, 9, 859-868; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Performance of a Diaphragmed Microlens for a Packaged Microspectrometer Joe Lo 1, Shih-Jui Chen 2, Qiyin Fang 3, 4, Thanassis Papaioannou 3, Eun-Sok Kim 2, Martin Gundersen 2 and Laura Marcu 5,* 1 Biomedical Engineering, University of Southern California, Los Angeles, CA, USA; E-Mail: jlo@ 2 Electrical Engineering and Electrophysics, University of Southern California, Los Angeles, CA USA; E-Mails: shihjuic@; eskim@;mag@ 3 Cedars Sinai Medical Center, Los Angeles, CA, USA; E-Mail: p_thanassis@ 4 Engineering Physics, McMaster University, Hamilton, Ontario, Canada; E-Mail: qiyin.fang@mcmaster.ca 5 Biomedical Engineering, University of California at Davis, USA * Author to whom correspondence should be addressed; E-Mail: lmarcu@; Tel.: +1-530-725-0288 Received: 4 November 2008; in revised form: 9 January 2009 / Accepted: 4 February 2009 / Published: 6 February 2009 Abstract: This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M2 value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD im