photocurable polymers for ion selective field effect transistors. 20 years of applications光固化聚合物离子选择场效应晶体管。20年来的应用程序.pdfVIP

Sensors 2009, 9, 7097-7110; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Review Photocurable Polymers for Ion Selective Field Effect Transistors. 20 Years of Applications Natalia Abramova * and Andrei Bratov Instituto de Microelectrónica de Barcelona (IMB-CNM-CSIC), Campus UAB, 08193 Bellaterra, Barcelona, Spain; E-Mail: andrei.bratov@imb-cnm.csic.es * Author to whom correspondence should be addressed; E-Mail: natalia.abramova@imb-cnm.csic.es; Tel.: +34-935-947-700; Fax: +34-935-801-496. Received: 10 June 2009; in revised form: 27 August 2009 / Accepted: 29 August 2009 / Published: 7 September 2009 Abstract: Application of photocurable polymers for encapsulation of ion selective field effect transistors (ISFET) and for membrane formation in chemical sensitive field effect transistors (ChemFET) during the last 20 years is discussed. From a technological point of view these materials are quite interesting because they allow the use of standard photo- lithographic processes, which reduces significantly the time required for sensor encapsulation and membrane deposition and the amount of manual work required for this, all items of importance for sensor mass production. Problems associated with the application of this kind of polymers in sensors are analysed and estimation of future trends in this field of research are presented. Keywords: ISFET; photocurable; polymers; membrane; chemical sensor 1. Introduct