porous silicon based resonant mirrors for biochemical sensing基于多孔硅的共振镜生化传感.pdfVIP

Sensors 2008, 8, 6549-6556; DOI: 10.3390/s8106549 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Porous Silicon Based Resonant Mirrors for Biochemical Sensing Edoardo De Tommasi 1,*, Luca De Stefano 1, Ilaria Rea 1, 2, Valentina Di Sarno 1, 2, Lucia Rotiroti 1,3, Paolo Arcari 4, Annalisa Lamberti 4, Carmen Sanges 4 and Ivo Rendina 1 1 Institute for Microelectronics and Microsystems – Unit of Naples – National Council of Research, Via P. Castellino 111, 80131 Napoli, Italy. 2 Department of Physical Sciences, University of Naples “Federico II”, Via Cinthia, 80126 Naples, Italy 3 Department of Organic Chemistry and Biochemistry, University of Naples “Federico II”, Via Cinthia, 80128 Napoli, Italy 4 Department of Biochemistry and Medical Biotechnologies, University of Naples “Federico II”, Via S. Pansini 5, 80131 Napoli, Italy. * Author to whom correspondence should be addressed: edetommasi@r.it Received: 6 June 2008; in revised form: 6 October 2008 / Accepted: 21 October 2008 / Published: 23 October 2008 Abstract: We report on our preliminary results in the realization and characterization of a porous silicon (PSi) resonant mirror (RM) for optical biosensing. We have numerically and experimentally studied the coupling between the electromagnetic field, totally reflected at the base of a high refractive index prism, and the optical modes of a PSi waveguide. This configuration is very sensitive to changes in the refractive index and/or in thickness of the sensor surface. Due to the high specific area of the PSi w