preparation of sno2 films with thermally stable nanoparticlessno2薄膜的制备与热稳定的纳米粒子.pdfVIP

Sensors 2003, 3, 438-442 sensors ISSN 1424-8220 © 2003 by MDPI /sensors Preparation of SnO2 Films with Thermally Stable Nanoparticles Arsen Z. Adamyan, Zaven N. Adamian, Vladimir M. Aroutiounian * Department of Physics of Semiconductors Microelectronics, Yerevan State University, 1, Alex Manoogian, Yerevan 375025, Armenia. Tel/Fax: +374 1 555590 * Author to whom correspondence should be addressed: varou @semicond.ysu.am Received: 3 Ap ril 2003 / A ccep ted: 11 Sep temeber 2003 / Published: 31 October 2003 Abstract: Different regimes of preparations of nano-sized particles of SnO2 are considered. The films technology ensuring weak dependence of grains size on films calcinations temperature is offered. Keywords: Nanoparticles, SnO , gas sensor, sol-gel. 2 Introduction The physical and gas-sensing behaviors of semiconductor gas sensors are directly depend on their preparation methods and conditions. One of the main obj ectives for the researches in the field is the obtaining of nanoparticles of possibly smallest dimensions. There are different methods of obtaining such a nanocrystalline samples by hydrolysis of tin chloride, for example, in ammonia aqueous solutions. Using these techniques, SnO2 particles with sizes beginning from a few nanometers are obtained. However, the size of particles strongly depends on the calcination temperatures [1-4], which o is needed for complete decompositi