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resonant frequency characteristics of a saw device attached to resonating micropillars看到设备附加到共鸣共振频率特征micropillars.pdf

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resonant frequency characteristics of a saw device attached to resonating micropillars看到设备附加到共鸣共振频率特征micropillars

Sensors 2012, 12, 3789-3797; doi:10.3390/s120403789 OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Communication Resonant Frequency Characteristics of a SAW Device Attached to Resonating Micropillars N. Ramakrishnan 1,*, Harshal B. Nemade 2 and Roy Paily Palathinkal 3 1 School of Engineering, Monash University Sunway Campus, Jalan Lagoon Selatan, 46150 Bandar Sunway, Selangor Darul Ehsan, Malaysia 2 Electronics and Electrical Engineering and Centre for Nanotechnology, Indian Institute of Technology Guwahati, Guwahati 781039, India; E-Mail: harshal@iitg.ernet.in 3 Electronics and Electrical Engineering, Indian Institute of Technology Guwahati, Guwahati 781039, India; E-Mail: roypaily@iitg.ernet.in * Author to whom correspondence should be addressed; E-Mail: ramakrishnan@; Tel.: +603-5514-6256; Fax: +603-5515-6207. Received: 19 January 2012; in revised form: 29 February 2012 / Accepted: 1 March 2012 / Published: 23 March 2012 Abstract: Recently we reported experimental and simulation results on an increase in resonance frequency of a SAW resonator caused by mass loading of micropillars made of SU-8, attached normal to the surface of the resonator. We concluded that SAW resonator and the SU-8 micropillars in unison form a system of coupled resonators. We have now extended this work and performed a finite element method simulation to study the resonance frequency characteristics of the SAW-based coupled resonator. In this paper we report the effect of the resonance frequency of the micropi