surface acoustic waveammonia sensors based on st-cut quartz under periodic al structure声表面waveammonia传感器基于st-cut石英在周期性结构.pdfVIP

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surface acoustic waveammonia sensors based on st-cut quartz under periodic al structure声表面waveammonia传感器基于st-cut石英在周期性结构.pdf

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surface acoustic waveammonia sensors based on st-cut quartz under periodic al structure声表面waveammonia传感器基于st-cut石英在周期性结构

Sensors 2009, 9, 980-994; doi:10.3390/ OPEN ACCESS sensors ISSN 1424-8220 /journal/sensors Article Surface Acoustic Wave Ammonia Sensors Based on ST-cut Quartz under Periodic Al Structure Cheng-Liang Hsu, Chi-Yen Shen*, Rume-Tze Tsai and Ming-Yau Su Department of Electrical Engineering, I- Shou University, Kaohsiung County, 84001, Taiwan E-mails: csz@.tw (C.L.H.); m9501003@.tw (R.T.T.); t0912785177@ (M.Y.S.) * Author to whom correspondence should be addressed; E-Mail: cyshen@.tw; Tel.: +886-7- 6577711; Fax: + 886-7-6577205 Received: 16 January 2009 / Accepted: 13 February 2009 / Published: 16 February 2009 Abstract: Surface acoustic wave (SAW) devices are key components for sensing applications. SAW propagation under a periodic grating was investigated in this work. The theoretical method used here is the space harmonic method. We also applied the results of SAW propagation studied in this work to design a two-port resonator with an Al grating on ST-cut quartz. The measured frequency responses of the resonator were similar to the simulation ones. Then, the chemical interface of polyaniline/WO composites was coated on 3 the SAW sensor for ammonia detection. The SAW sensor responded to ammonia gas and could be regenerated using dry nitrogen. Keywords: Rayleigh SAW, space harmonic method, ammonia, polyaniline/WO3. 1. Introduction The release of various pollutants into the atmosphere has caused global enviro