热发射扫描电镜技术规格及要求（Technical specifications and requirements for thermal emission scanning electron microscopy (SEM)）.doc

热发射扫描电镜技术规格及要求（Technical specifications and requirements for thermal emission scanning electron microscopy (SEM)） Technical specifications and requirements for thermal emission scanning electron microscopy (SEM) 1, equipment composition, layout and instructions 1.1 equipment name: thermal emission scanning electron microscope 1.2 quantity: a set The 1.3 field emission scanning electron microscope is mainly composed of the following parts: Host: thermal field emission scanning electron microscope Annex: electric refrigeration spectrum (EDS) and EBSD integrated system; ion beam coating instrument; precision cutting machine; semi-automatic grinding / polishing machine; vibration polishing machine. 1.4, recommended layout: open layout. 1.5. electron microscopy is mainly used to observe the micro morphology of materials and requires the device to be directly conductive (gold) Metal materials, semiconductor materials) and non-conductive materials (plastics, ceramics, glass etc.) were observed, in order to meet the research demand analysis and approximate observation of original state related samples; with EDS analysis, qualitative and quantitative distribution analysis and elemental line scanning and surface micro area composition of materials; with EBSD, the real-time acquisition of backscattered electron and calibration of electron back scatter diffraction, quick access by crystallographic structure information, analysis of crystal orientation, research materials and microtexture related material properties etc.. 1.6. can realize automatic detection through program control. 2, technical requirements 2.1. field emission scanning electron microscope FESEM Field emission scanning electron microscope (SEM), as the most critical component, requires the use of internationally renowned brand products. The bid document shall give a detailed description of the brand, characteristics and technical specifications of the selected field emission microscope. One performance parameter