热发射扫描电镜技术规格及要求（Technical specifications and requirements for thermal emission scanning electron microscopy (SEM)）.docVIP

热发射扫描电镜技术规格及要求（Technical specifications and requirements for thermal emission scanning electron microscopy (SEM)） Technical specifications and requirements for thermal emission scanning electron microscopy (SEM) 1, equipment composition, layout and instructions 1.1 equipment name: thermal emission scanning electron microscope 1.2 quantity: a set The 1.3 field emission scanning electron microscope is mainly composed of the following parts: Host: thermal field emission scanning electron microscope Annex: electric refrigeration spectrum (EDS) and EBSD integrated system; ion beam coating instrumen