深圳大学课件薄膜物理与技术1.ppt

Scaling Trend – Story of Si The discovery of carbon nanotubes Introduction to STM: History of STM ?STM was first invented by Gerd Binning and Hienrich Rohrer in 1981 at IBM Laboratories.? They could get images that were ten angstroms square! ?????????????????????????? ?????????????????????????? Gerd Binning Hienrich Rohrer Introduction to STM: History of STM G. Binning, and his supervisor H. Rohrer conducted studies on superconductivity in IBM lab in Switzerland. They focused on the super-conductive tunneling effect in vacuum. In fact, their original research has nothing to do with the invention of new microscope. One day in 1981, they read a paper written by R. Yang on “ How to drive a probe scan on a surface. They realized that it is possible to use tunneling effect for obtaining the surface morphology of a conductor. In March 1982, G. Binning, H. Rohrer, Ch. Gerber and E. Weibel observed electrons tunneling between W tip and Pt, and in combination with scanning marked the birth of STM. Introduction to STM: History of STM First STM image Introduction to STM: History of STM ?Gerd Binning and Hienrich Rohrer were awarded Nobel prize in physics in 1986 due to their great contribution in developing STM. Noble Prize in Physics in 1986 1/2 Nobel prize to Dr. Ernest Ruska: TEM 1/4 Nobel prize to Dr. Gerd Bining: STM 1/4 Nobel prize to Dr. Hienrich Rohrer: STM Theory of STM: Tunneling Effect Theory of STM: Tunneling Effect Tunneling effect Theory of STM: Feedback Feedback The STM tip is attached to a piezo –electric element; Piezo element changes its length a little bit when it is applied an voltage; By adjusting the voltage, the distance between the tip and the surface can be regulated; Theory of STM: Scanning modes Scanning mode I: constant height (flat surface) sample tip path of tip constant current Theory of STM: Scanning modes Scanning mode II: constant current sample tip path of tip constant current * * 薄膜物理与技术 Thin Film physics and t