静电刚度式谐振微加速度计闭环驱动控制-控制理论与应用.pdfVIP

28 10 Vol. 28 No. 10 2011 10 Control Theory Applications Oct. 2011 : 1000−8152(2011)10−1405−08 1,2 2 2 2 2 , , , , (1. , 400030; 2. , 621900) : , . , . , . , PI , PI, ; , . , . : ; ; ; ; : V241.5 : A Closed-loop control for resonant accelerometer based on electrostatic stiffness