静电刚度式谐振微加速度计闭环驱动控制-控制理论与应用.pdf

28 10 Vol. 28 No. 10 2011 10 Control Theory Applications Oct. 2011 : 1000−8152(2011)10−1405−08 1,2 2 2 2 2 , , , , (1. , 400030; 2. , 621900) : , . , . , . , PI , PI, ; , . , . : ; ; ; ; : V241.5 : A Closed-loop control for resonant accelerometer based on electrostatic stiffness 1,2 2 2 2 2 LIU Heng , HE Xiao-ping , ZHANG Feng-tian , SU Wei , ZHANG Fu-tang (1. College of Communication Engineering, Chongqing University, Chongqing 400030, China; 2. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang Sichuan 621900, China) Abstract: We investigate the requirements of closed-loop control for a resonant micro-accelerometer, for which we develop a closed-loop of gain-control for stabilizing the amplitude and a phase-locked loop for tracking the frequency. Because of the obstacle of high order of nonlinearity of the system, we had to employ the average method for analyzing the system stability and determining the equilibrium point. The analysis reaches a critical condition for the integral controller in the stable tracking of the closed-loop frequency. As for the amplitude-stabilization loop with auto-gain, the analysis shows that an oscillation with constant amplitude can not be achieved without a PI controller. When the PI controller is introduced, the oscillation amplitude and the performance index are independent from the frequency, and the same value of amplitude can be realized by a smaller value of the reference voltage. Simulation results confirm the above conclusions. When