基于规则的批处理设备调度方法在半导体晶圆制造系统中应用.PDFVIP

See discussions, stats, and author profiles for this publication at: /publication/282697001 Rule-based scheduling of batch processing machine applied to semiconductor wafer fabrication system Article in Shanghai iaotong Daxue Xuebao/ ournal of Shanghai iaotong University · February 2013 CITATION READS 1 30 7 authors, including: Zhibin iang You Li Shanghai iao Tong University