角度测量的光学方法研究.docVIP

角度测量的光学方法研究 熊青松 （安徽建筑工业学院数理系，合肥230022） 摘　要：角度测量是计量科学的重要组成部分，广泛应用于我们的工业生产和科学研究领域。随着科学技术和生产工艺的飞速发展，在精密加工、航空航天、军事和通讯等许多领域都对角度、特别是小角度的测量提出了越来越高的要求。光电测角法由于具有非接触、高精度和高灵敏度的特点而倍受人们的重视，尤其是随着激光光源的发展和精密传感器的出现，使光电测角的测量精度不断提高，应用也越来越广泛。现阶段由于运用了各种先进的测量手段和测量仪器，使测量的精度和灵敏度达到了很高的水平。但是，传统的小角度测量仪器如激光干涉仪，光电自准直仪等，由于具有体积大，系统复杂，造价昂贵，对测量环境要求高等特点而很难用于工业生产和高精度在线测量。 目前，光学三角法在测量物体位移、厚度和三维面形等方面均达到了相当高的精度，有很好的研究价值和实用性。正是基于此，本文开展了把光学三角法用于小角度的在线测量研究。 关键词：角度测量；光学方法；光学三角法；面阵CCD Research on Angle measurement with optical methods Xiong qingsong (Department of mathematics physics, Anhui Institute of Architecture and Industry, Hefei,230022,China) Abstract：Angle measurement is one of the most important parts of metrology, which is used widely in industrial production and the scientific research domain. With the science and technology rapid development, the high precision of angle measurement is requested in the precise processing, the aerospace, the military affairs and the communication and so on, especially small angle measurement. People pay more attention to the photoelectric method, which has the non-contact, the high accuracy and the high sensitivity strongpoint, especially with the laser device development and the precision sensor appearance, the photoelectric method抯 measuring accuracy is unceasingly enhancing, and the application domain is more widespreading. At present stage because used advanced survey method and metering equipment, the survey accuracy and precision has been achieved a high level. But the instrument of traditional small angle measurement like laser interferometer, photoelectric collimator and so on, can hardly he used as angle sensor in industrial production and high accuracy on-line measurement because they are bulky, complicated, expensive, and demanding strict work environment. At present, optical triangulation in measurement of displacement, thickness and three-dimension shape etc had achieved a high precision, so it has high usability and research value. Based on th