中英文文献翻译-微型半导体流量传感器的开发.docVIP

Development of miniaturized semiconductor flow sensors F.Kohl，R.Fasching，F.Keplinger，R.Chabicovsky,A.Jachimowicz,G.Urban Miniaturized flow sensors based on thin film germanium thermistors were developed offering high flow sensitivities and short response times. The thermistors are placed on a silicon nitride diaphragm carried by a silicon frame. Using the 3 controlled overtemperature scheme the measurable airflow rate ranges from 0.6 to 150 000 cm /h. In this paper we mainly report on the dynamic properties of the sensor. The response of the sensor to step changes of the heater power will be compared with its response to shock waves for both the constant power mode and the constant overtemperature operating mode. A simple arrangement for the generation of acoustic shock waves will be presented. 1．Introduction There is a growing demand of micro-flow sensors for industrial, automotive, domestic and medical applications. The measuring principle can be based on thermistors, thermopiles, pyroelectric elements, pn-junctions, resonating microbridges, Prandtl tubes and several other effects [1–10]. Micromachining is adopted to achieve high sensitivity, quick response and low power consumption。 One important application of flow sensors is the measuring of the instantaneous air intake of combustion engines. Knowledge of this combustion process parameter is essential if one tries to minimize both the engine’s fuel consumption and the pollution of the environment. For the development of such engines a wide velocity measuring range and high resolution monitoring of the time course of the air velocity is desirable. The electrocalorimetric flow sensor presented here is based on a heat transfer principle in which a heated body is cooled by a passing flow and the local rate of cooling depends on the flow velocity [11]. The sensor is based on the so-called ‘hot film’ flow measurement method. A very thin silicon nitride diaphragm supported by a micromachined silicon frame is mounte