微电子专业英语张红31130微电子专业英语课件.pptVIP

译文：磁过滤器一方面通过定向的永磁体形成一个磁场，该磁场的方向垂直于离子从离子源区域运动到离子引出区域的方向。 n another embodiment, low energy 16 eV electrons are injected into the ion source to dissociate gas molecules and undesired ion species into desired ion species. dissociate v. 分解 undesired adj. 非向往的 Supplementary Words： undesired signal 干扰信号 译文：另一方面，将低16eV能量的电子注入到离子源区域，离解气体分子和不需要的离子种类形成我们所需要的离子种类。 Multi-cusp Magnetic?Field:? The density of a plasma is dictated by the balance between production and loss processes, with the added restriction that to maintain neutrality the ion charge and electron charge densities must be equal. dictate v. 口授, 口授, 口述,要求 译文：多极磁场：等离子体的密度取决于离子产生过程和损耗过程之间的平衡。因为有约束要求要保持电中性，所以离子电荷密度必须等于电子电荷密度。 Energetic electrons, which are more useful for ionisation, are more easily lost to the chamber walls than the slower ions unless steps are taken to return the fast electrons to the plasma. energetic adj. 精力充沛的, 充满活力, 能量的, 有力的 It would also be of advantage to allow slow electrons with less than the minimum ionisation energy to escape thus reducing the possibility of electron-ion recombination. 译文：那些更有利于电离的高能电子比慢离子更容易丢失于腔壁上，除非增加措施将这些快电子恢复成等离子。同时这也有利于使那些低于电离最小能的慢电子逸出，从而减少电子—离子的复合几率。 A strong multipole magnetic field surrounding the plasma volume meets these requirements. multipole n. 多极 译文：围绕在等离子体周围的强多极磁场就能满足这些要求。 Permanent?Magnets Samarium-cobalt about 1.5 killoGauss. 译文：钐钴永磁体的磁场强度大约有1500高斯。 The?Antenna is supported by the base has a metallic radio frequency conducting segment mounted directly within the gas confinement chamber to deliver ionizing energy into the gas ionization zone. segment n. 部分, 线段, 段, 体节 confinement n. 监禁, 限制, 关押 译文:直接安装在气体密封腔内由底座支撑的天线具有一个金属无线电射频传导波段，可以将电离能传送到气体电离区。 Figure 5-10 The basic structure of the ion source The ion beam system is also an important component of the ion implanter. From figure 5-19 we can see it has three modes of operation, Drift, Post Accel, and Post Decel. Drift simple means that the energy of the ion beam does not increas