以电浆电解氧化法于钛薄膜底材上制备钛酸钡膜之特性及其抗腐蚀研究.pdfVIP

以電漿電解氧化法於鈦薄膜底材上製備鈦酸鋇膜之特性及其抗腐蝕研究 防蝕工程　第二十六卷第二期　第99 ~ 106 頁　2012 年6 月 Journal of Chinese Corrosion Engineering, Vol. 26, No. 2, pp. 99 ~ 106 (2012) 曾珠玲、鄧煥平、楊家榮、呂福興* Characterization and Corrosion Resistance of Barium Titanate Films Prepared on Ti Underlayers by Plasma Electrolytic Oxidation J. L. Zeng, H. P. Teng, C. J. Yang, F. H. Lu* Received 20 August 2011; received in revised form 29 March 2012; accepted 17 April 2012 本研究主要是以電漿電解氧化法於 Ti/Si 上製備鈦酸鋇膜，並探討成膜後對抗腐蝕性 質之影響。首先將Ti/Si 浸置於0.5 M 醋酸鋇和2 M 氫氧化鈉電解液中，以定電壓模式70 V 於 70 °C 進行電漿電解氧化反應 3 分鐘。由X 光繞射分析結果顯示，反應後之生成物為立 方相鈦酸鋇。經場發射掃描式電子顯微鏡結果得知，鈦酸鋇膜表面結構為多孔結構；由橫 截面圖發現鈦酸鋇膜厚約530 ± 30 nm 。於極化腐蝕分析結果發現，反應後之試片與原始Ti/Si 之腐蝕電位，分別為−0.108 V 和−0.262V vs. Ag/AgCl ，利用電漿電解氧化法於Ti/Si 上製備 鈦酸鋇膜具有良好的抗腐蝕性。 關鍵詞：電漿電解氧化；Ti/Si ；BaTiO3 ；抗腐蝕。 ABSTRACT Barium titanate (BaTiO ) films were synthesized on Ti/Si substrates by plasma electrolytic 3 oxidation (PEO). Corrosion resistance of the obtained BaTiO3 films was also studied. Mixed 0.5 M Ba(CH COO) and 2 M NaOH alkaline solutions were used as the electrolytes. The PEO process 3 2 was conducted at a potentiostatic mode with an applied voltage of 70 V for 3 minutes at 70 °C. X- ray diffraction results showed that cubic BaTiO3 films were successfully grown. Field-emission scanning electron microscopy revealed that the BaTiO3 films possessed uniformly distributed porous morphologies. The t