Microstructure and mechanical properties of （Ti,AI,Zr）N_（Ti,AI,Zr,Cr）N films on cemented carbide substrates.pdfVIP

InternationalJournalofMinerals，MetallurgyandMaterials Volume21，Numberf，January2014，Page77 DOI：10．1007／s12613-014-0868-Y Microstructureandmechanicalpropertiesof(Ti，AI，Zr)N／(Ti，AI，Zr，Cr)Nfilms oncementedcarbidesubstrates — luZhao，，JunZhang¨ZhenZhang3)Shuang-hongWang¨andZheng-guiZhang) ， ， ， 1)SchoolofMechanicalEngineering，ShenyangUniversity，Shenyang110044，China 2)KeyLaboratoryforAdvancedMaterialsPreparationTechnologyofLiaoningProvince，ShenyangUniversiyt，Shenyang110044，China 3)PaintShop，BMWBrillianceAutomotiveLtd，Sh~ynag110143，China (Received：11June2013；revised：21August2013；accepted：26August2013) Abstract：(Ti，A1，Zr)N／(Ti，A1，Zr，Cr)N bilayerfilmsweredepositedoncementedcarbide(WC一8％Co)substratesbymulti—arcionplating (MAIP)usingtwoTi—AI—ZralloytargetsandonepureCrtraget．Toinvestigatethecomposition，morphology，andcrystallinestructureofthe bilayerfilms，anumberofcomplementarymethodsofelementalandstrucutralanalysiswereused，namely，scanningelectronmicroscopy (SEM)，eneryg disperseX-rayspectroscopy(EDS)，andX—raydiffraction(XRD)．Adhesivestrengthandmechanicalpropertiesofthefilms wereevaluated by scratch testingand Vickersmicroindentation，respectively．Itisshown thattheresulting filmshave aTiN—type face—centeredcubic(FCC)structure．Thefilmsexhibitfullydense，uniform，andcolumnarmoprholoyg ．Furthermore，asthebiasvoltages varyfrom一50to-200V，themicrohardness(max．Hv0014100)andadhesivestrength(max．200N)ofthebilayerfilmsaresuperiorto thoseofthe(Ti，A1，Zr)Nand(Ti，A1，Zr，Cr)Nmonolayerfilms． Keywords：nitrides；thinfilms；cementedcarbides；microstruc~re；mechanicalproperties nessandexcellentadhesives~ength．Previousstudies 【l2] 1．Introduction have shown the promising mechanicalproperties of (TiA，1，Zr)Nand(Ti，A1，