电子显微分析（章晓中）教学课件chapter17.pdfVIP

6.2 SEM structure and how it works • Knoll proposed the principle of the SEM (1935). st • Hill made the 1 SEM (1942). • The modern SEM came from the research results of Oatley st group of Cambridge University (1948-1965). The 1 commercial SEM was made in Cambridge (1965). • SEM is mainly used for topographic observation of bulk specimen. • The best SEM has a resolution of 0.4nm. • SEM manufacturers: FEI, HITACHI, JOEL, ZEISS • The SEM is similar to the TEM in that they both employ a beam of electrons directed at the specimen. This means that certain features, such as the electron gun, condenser lenses and vacuum system, are similar in both instruments. • However, the ways in which the images are produced and magnified are entirely different. Incident beam • TEM provides information about the internal structure of thin specimens. Thin specimen TEM uses the transmitted electrons. • SEM is mainly used to study the Screen/detector surface morphology, or near surface TEM structure of bulk specimens. SEM Incident uses the “ejected” electrons. beam detector Bulk specimen SEM TEM image of columnar grains SEM image of a fracture surface of the in Al/Ti multilayer system Al/Ti multilayer system How SEM works An electron gun produces electrons, and electron accelerat