电子显微分析（章晓中）教学课件chapter18.pdfVIP

6.5 SEM sample preparation • SEM uses bulk specimen. It is much easier to prepare SEM specimen than TEM specimen. • The size of SEM sample is dependent on the specimen stage of SEM. – In some SEMs you can mount (装) a specimen as large as 150150  50mm. Charging (荷电） • When a specimen is bombarded with high energy electrons, for each electron impinging (撞击) on the specimen there is a yield of  backscattered electrons and  secondary electrons. • Consequently, during normal operation there is a surplus (剩余) of electrons building up on the specimen surface. If they are not conducted away to earth, the specimen surface will become negatively charged until very soon the incoming primary electrons are repelled and deviated from their normal path, and a distorted image will be formed. This phenomenon is called charging. The polymer spheres seem to The charging artifact has been show a complicated interior eliminated structure due to charging For effective viewing of a specimen in the SEM, the surface of the specimen must be electrically conducting --coating an conducting layer (Au or C) • The figure shows the variation of the total electron yield (+) with the accelerating voltage of the SEM. There are only two operating voltages for the SEM where the yield is unity and hence electrons are leaving the surface at the same rate as they are hitting it. There are no charging at these two voltages (crossover voltage) . • For most materials the crossover voltage Vc1 is in the range 1-5 kV. When V Vc1, the electron yield 1. No charging! To avoid charge, low voltage is used. Coating SEM specimen • conducting specimen: no need to coat (if they are mounted well to provide a conducing path to earth). • non-conductors specimen: coat a thin (