电子显微分析（章晓中）教学课件chapter19.pdfVIP

6.8 Electron Backscatter Diffraction (EBSD) 电子背散射衍射 • EBSD is a diffraction technique for obtaining local crystallographic informationfrom the surface of bulk samples. • In EBSD, a beam of electrons is directed onto a tilted crystalline sample in a SEM. The electrons interact with the specimen to generate backscattered electron (BSE). Some of these BSEs satisfy the Bragg’s Law to generate Kikuchi diffraction. These BSEs go out of the sample surface to form electron backscatter diffraction pattern (EBSP) on the phosphor screen. Facilities needed for EBSD Application of EBSD •measure crystal orientation (Point analysis) •measure grain boundary misorientations (Crystal Orientation Mapping) •Discriminate (分辨) between different materials •representation of grains and grain boundaries •provide information about local crystalline perfection •show the preferred crystal orientations (texture) presented in the material. Point analysis • The beam is positioned at a point of interest on the sample, a diffraction pattern collected and the crystal orientation calculated. • This provides a quick overview of the crystallinity of the sample and the range of grain orientations present . Phase Identification using EBSD Ni S x y 立方 cubic Ni S x y 正交 orthorhombic S Ni S x y 单斜 monoclinic Ni NiS 斜方 Ni S