电子显微分析（章晓中）教学课件chapter20.pdfVIP

实验三SEM 分组和时间安排 组号 学号 日期 时间 1 2010011904 －2010011914 ， 12月12 日 1:30－2:30pm 2 2010011915 －2010011928 12月12 日 2:30 －3:30pm 3 2010011930 －2010011941 12月12 日 3:30 －4:30pm 4 2010011942 －2010011952 12月12 日 4:30 －5:30pm 5 2010011953 －2010011964 12月12 日 5:30－6:30pm 6 2010011966 －2010011978 12月13 日 3:30 －4:30pm 7 2010011979 －2010011989 12月13 日 4:30 －5:30pm 8 王聪，徐贤铤，孙骁航，金祖鑫，陈 12月13 日 5:30－6:30pm 曦，朴栽亨，郑善基，郑丞真，朴真 实，傅伟 实验课在东主楼11区电镜中心一楼做，实验课要签到，未参加者没有实 验课分数。与其他课有冲突的同学可与其他组同学交换时间（要保证每 组不多于11人）. ESEM and VPSEM • Environmental SEM (ESEM) – is a trade-make (商标) of FEI – pressure is ~2700Pa (20torr) – Use gaseous secondary electron detector (GSED) • Variable pressure SEM (VPSEM or LVSEM) – Pressure is ~266Pa (2 torr) – May not use gaseous secondary electron detector (GSED) ESEM in market • FEI: Quanta 650 FEG Quanta 650 FEG –Pressure: -4 6 ×10 Pa - 4000Pa (SE) (ESEM) –Resolution: 1.0nm @30kV (SE) 1.4nm @30kV (ESEM) ESEM/VPSEM overcome charging problem • The presence of gas in the specimen chamber of the ESEM/VPSEM can overcome the problem of charging, making it possible to observe all materials however insulating they may be. • This is because the interactions between electrons and the gas result in the production of positive ions, which can change the charge balance at the specimen. If sufficient ions are produced, then the charging of the specimen can be neutralized by the flood of positive ions.