电子显微分析（章晓中）教学课件chapter21.pdfVIP

Chapter 7 Microanalysis Introduction • Microanalysis implies that an analysis can be performed on a very small amount of materials, or more usually a very small part of a larger specimen. • Microanalysis in electron microscopy is an important tool for characterizing all types of solid material. X-ray spectrometer • Energy Dispersive X-ray Spectrometer (EDS) 能谱仪 – Used for TEM and SEM – Most commonly used – Energy resolution is not very high, but fast • Wavelength Dispersive X-ray Spectrometer (WDS) 波谱仪 – Used only for SEM and EPMA – Energy resolution is high, but slow electron microscopes commonly used for microanalysis • SEM with X-ray spectrometer (EDS WDS ) • Electron Probe Microanalyser (EPMA) 电子 探针 – is essentially a purpose-built analytical microscope of SEM type • Transmission electron microscopes (TEM and STEM) equipped with EDS and EELS – is a analytical type TEM (AEM) 7.1 Energy Dispersive X-ray Spectrometer (EDS) /能量色散谱仪（能谱仪） ＋ EDS X-ray WDS spectrometer EDS EDS EELS Structure of EDS Kept in LN temperature X-Y Electron recorder Be beam window Main X-ray amplifier MCA CRT FET of pre-a