2-第一章-真空技术基础1.pptVIP

本章小 结 概念 最可几速度、平均速度、均方根速度、平均自由程等 换算 常用压强单位的换算 分类 真空区域的划分、真空计、各种真空泵 原理 机械泵、扩散泵、分子泵的工作原理，真空计的工作原理 ? 扩散泵 Diffusion Pumps 射流速度 200m/s 1.3 真空的获得－抽真空 Momentum transfer to gas molecules through collision with directed jet of oil molecules Require cooling water, backing pump 10-3 to 10-7 Torr (to 10-9 Torr with LN2 cooling) Advantages Robust（高效） High pumping speed for relatively low cost. No vibration or noise. Disadvantages Oil as a pumping medium, high risk of back-streaming oil, cold traps（冷阱）required Potential for serious vacuum problems 1.3 真空的获得－抽真空 扩散泵极限压强 PL前级真空泵压强；n蒸气分子密度；L是蒸气流从泵的进气口