Fabrication of the convex blazed grating英文文献.pdfVIP

Fabrication of the convex blazed grating ∗a,b a a a,b LIU Quan , WANG Haibin , SUN Peng , WU Jianhong a Institute of Information Optical Engineering, Soochow University, Suzhou, China, 215006 b Jiangsu Province Key Laboratory of Modern Optical Technology, Soochow University, Suzhou, China, 215006 ABSTRACT The convex grating is one of the key elements in hyperspectral imaging spectrometers. In this paper the diffraction characteristics of the convex blazed grating is investigated by using rigorous coupled-wave theory, which indicates that within the wavelength from 0.4μm to 0.8μm, the plus first-order diffraction efficiency can be over 35% through controlling the blaze angle of blazed grating. The convex blazed grating with the period of 5μm in the center, the blaze angle about 4.3 degree, and the ruled area – a convex substrate with its radius 72mm and aperture 35mm has been fabricated by holographic- scan ion beam etching. Experimental measurements show that the plus first-order diffraction efficiency is more than 35%, within the wavelength from 0.4μm to 0.8μm. Keywords: Diffraction gratings; convex blazed grating; holographic lithography; scan ion beam etching; diffraction efficiency 1. INTRODUCTION Hyperspectral imaging spectrometers are radiation sensors that provide a collection of spectral images of an inhomogeneous scene. This allows the spectral signature for each object point to be determined