机械外文翻译文献翻译利用PDMA制造的MEMS直立平面线圈式.pdfVIP

Development of MEMS Vertical Planar Coil Inductors Through Development of MEMS Vertical Planar Coil Inductors Through DDeevveellooppmmeenntt ooff MMEEMMSS VVeerrttiiccaall PPllaannaarr CCooiill IInndduuccttoorrss TThhrroouugghh PlasticDeformationMagneticAssembly(PDMA) PlasticDeformationMagneticAssembly(PDMA) PPllaassttiiccDDeeffoorrmmaattiioonnMMaaggnneettiiccAAsssseemmbbllyy((PPDDMMAA)) JinghongChen*,JunZou**,ChangLiu** and Sung-Mo(Steve)Kang*** AgereSystems,Holmdel,NJ 07733 DepartmentofElectricalandComputerEngineering, UniversityofIllinoisatUrbana-Champaign,Urbana, IL61801Jack Baskin SchoolofEngineering, UniversityofCalifornia, SantaCruz ABSTRACT ABSTRACT AABBSSTTRRAACCTT This paper presents the results of the development of a vertical planar coil inductor. The planar coil inductor is first fabricated on silicon substrate and then assembled to the vertical position by using a novel 3-Dimensional bathscale self-assembly process (Plastic Deformation Magnetic Assembly (PDMA)). Inductors of different dimensions are fabricated and tested. The S-parameters of the inductors before and after PDMA are measured and compared,demonstrating superior performance due to reduced substrate effects and also increased substrate space savingsfortheverticalplanarcoilinductors. Keywords Keywords KKeeyywwoorrddss:MEMS,planarcoilinductor,qualityfactor,PDMA,resonancefrequency. 1INTRODUCTION 1INTRODUCTION 11IINNTTRROODDUUCCTTIIOONN With the development of integrated wireless communication systems, on-chip inductors with satisfactory performance (enough quality factor and selfresonant frequency) are required. However, the conventional planar coil inductor suffers from substrate losses and parasitics since it is directly fabricated onto conductive substrate overavery thindielectriclayer[1].