[信息与通信]少子寿命测试仪故障翻译.doc

15. Diagnostics and Troubleshooting 15.诊断和故障 The WT-2000 is designed for years of r eliable operation. In the event that a problem occurs, refer to this chapter for procedures you can follow to diagnose the cause of the problem. In section 15.1, the user can find the terminology section, which describes the different parts of the system. It is necessary to understand the terminology in order to do effective troubleshooting. Later sections contain a collection of possible problems and the methods to eliminate them. The topics are organized as shown below: WT-2000 年 r eliable 运作设计。在该事件中出现问题，请参阅本章程序您可以按照来诊断问题的原因。第 151 条用户可以找到条术语描述系统的不同部分。有必要了解术语做有效的疑难解答。后面各节包含可能存在的问题和消除这些方法的集合。该主题组织，如下所示： ? Communication Problems, section 15.2 · ? Problems at Initialization, section 15.3 · 4 ? Problems during measurement, section 15.4 ? μ-PCD Lifetime Measurement Errors, section 15.5 ? JPV Measurement Errors, section 15.6 15.1 Terminology 术语 This section defines the names of the parts in the system. 该章节定义了系统内各个部件的名称。 Section 15.1.1 describes parts of the scanner unit, section 15.1.2 describes parts of the industrial computer, and section 15.1.3discusses the operational software, including the System Diagnostic file. 15.1.1章节阐述扫描单元的部件。 15.1.2章节阐述了工业计算机的部件。 15.1.3章节讨论了运行软件，包括系统的诊断文件。 15.1.1 Parts of the Scanner Unit 15.1.1扫描仪单元的部件 Measurement Stage 测量工作台 The measurement stage (Figure 15-1) holds the sample. In the middle of the measurement stage, there are the vacuum chuck, which fixes the sample during the measurement, and the optional wafer lift pins which lift up and put down the wafer. 如图15-1示，测量工作台装有样品。在测量工作台中间，有一个真空吸口，用来在测量期间固定样品。 可选硅片升降针，用来升高或降低硅片。 Figure 15-1: Measurement stage 测量平台 On the right side of the measurement stage there are some outlets (Figure 15-2). （图15-2）测量工作台右侧有一个出口。 Figure 15-2: Outlets on the right side of the measurement stage 图 15-2： 测量工作台右侧的出口 The top one is the wafer lift cable (optional).顶部一个是硅片升降线。（可选项） The second one (from the top) is the ground (GND) c