利用湿式涡锥进行矽晶圆切割细泥资源化之研究.pdfVIP

利用濕式渦錐進行矽晶圓切割細泥資源化 之研究* A Study on Recycling Silicon Carbide from Kerf Loss Slurry Waste Using Hydrocyclone 1 2 3 4 W.H. Lee, C.W. Hsu, T.W. Cheng, C.S. Lin L ar g e am ou n t o f h a z ar d ou s silicon sawing slurry w ast es w er e generated from silicon wafer slicing pr ocess for solar cells. Th e w ast e slurry mainly contains silicon carbide and silicon. The particle size of the SiC in the slurry is 10 μm and that of Si is 1 μm. In this study, a series of 1 inch hydrocyclone was u sed to sep arate th e SiC and th e Si under differ ent feed pressures. The recovered SiC was analyzed by chemical analysis, particle size analysis, and SEM. The 30psi ( UF ) exp erim ent r esu lt sh ow ed th at th e 45% 95.8% silicon carbide recovery efficiency 93% ( UF ) was 73%, and the silicon carbide grade 98% 73% reached 98%. 關鍵詞： Key words: hydrocyclone, silicon carbide, silicon, silicon sawing waste 壹、前　言 * 1 2 3 4 －84 － 一○二年十二月