溶胶_凝胶法制备氧化锌薄膜_锡掺杂玻璃光波导及其气敏性研究.pdf

2011 年第69 卷 化 学 学 报 Vol. 69, 2011 第15 期, 1840～1844 ACTA CHIMICA SINICA No. 15, 1840～1844 ·研究简报· 溶胶-凝胶法制备氧化锌薄膜/锡掺杂玻璃光波导及其气敏性研究 米日古力•莫合买提a 阿斯娅•克里木b 帕提曼•尼扎木丁a 阿布力孜•伊米提*,a (a 新疆大学化学化工学院石油天然气精细化工教育部重点实验室 乌鲁木齐 830046) (b 新疆师范大学化学化工学院 乌鲁木齐 830054) 摘要 采用溶胶-凝胶法制备出氧化锌薄膜/锡掺杂玻璃光波导气敏元件, 并在光波导传感检测系统中对二甲苯气体进 行检测. 结果表明, 室温下该气敏元件对二甲苯气体有较好的响应, 而对相同浓度的其它挥发性有机气体的响应相对 较小, 能检测出的二甲苯气体的响应范围为 1×10－3 ～4 ×10－6, 而对其它挥发性有机物气体的响应相对较小. 同时该 气敏元件具有灵敏度高、稳定性好、制作工艺简单等特点. 关键词 光波导气敏元件; 氧化锌薄膜; 二甲苯 Preparation of Zinc Oxide Thin Film/Tin-Diffused Optical Waveguide Sensor and Gas-sensing Detection Mohemaiti, Mirigulia Keram, Asiyab Nezamidin, Patimaa Yimit, Abliz*,a (a College of Chemistry and Chemical Engineering, Xinjiang University, Key Laboratory of Oil and Gas Fine Chemicals, Educational Ministry of China, Urumqi 830046) (b College of Chemistry and Chemical Engineering, Xinjiang Normal University, Urumqi 830054) Abstract A new method for the detection of xylene gas by using an optical waveguide (OWG) sensor was studied. The zinc oxide thin films was fabricated by the sensitive element of this glass optical waveguide sensor with coating thin film of zinc oxide on the surface of tin-diffused glass optical waveguide by dip coating. The optical waveguide sensor was used as a typical example to detect a kind of volatile organic compounds (VOCs) ga