基于场致相变应变效应的反铁电厚膜微悬臂梁驱动构件研究-微电子学与固体电子学专业论文.docx

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基于场致相变应变效应的反铁电厚膜微悬臂梁驱动构件研究-微电子学与固体电子学专业论文.docx

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基于场致相变应变效应的反铁电厚膜微悬臂梁驱动构件研究-微电子学与固体电子学专业论文

Micro-ActuatorofAntiferroelectricThick Films Based on StressofPhaseTransition Induced By Direct Field AbstractAntiferroelectricmaterialstransformfromantiferroelectricstateintoferroelectricstateinducedbyexternalelectricfield,accompanyingbyhugechangesinthevolumeofmaterials.Thetransitioncausedagreattransformationstraineffect,andthetimeofphasetransitionisveryshort.Sotheheterogeneousintegrationbetweenantiferroelectricmaterialsandsiliconmicro-devicesachievedbyMEMStechnologyopenupanewwayfortherapidresponseandlargedisplacementofmicro-actuator.Inthispaper,thePreparationandphasetransitionbehaviorof(Pb,La)(Zr,Ti)O3antiferroelectricthickfilmswerestudiedindetails,andthemicro-actuatorofantiferroelectricthickfilmswerefabricatedbyMEMStechnology,andtheresponseandimplementcapacityofthemicro-actuatorwereinvestigationsystematically,whichprovidedexperimentalbasisandtheoreticalguidanceinthepracticalapplicationof newfunctionaldevices.(Pb,La)(Zr,Ti)O3antiferroelectricthickfilmswerepreparedbysol-gelprocessandthethicknesswasabout3-5μm.Theinfluenceofsolconcentration,heattreatmentandannealingtemperatureonthestructureanddielectricpropertieswerestudied.Theresultsshowthat:0.4mol/Lsolconcentration,multi-stepcycleannealingprocessand700oCannealingtemperatureweresuitableforpreparingtheantiferroelectricthickfilms.Thetemperatureinducedphasetransitionsandelectricfieldinducedphasetransitionbehaviorwerestudied.Underelectricfield,antiferroelectricthickfilmsoccurredthephasetransitionsofantiferroelectric(AFE)-ferroelectric(FE)andFE-paraelectric(PE)withtheincreasingoftemperature,andthedifferencebetweentemperaturesofphasetransformationswereincreasingwithelectric fieldincreasing.Thetemperature-dependent dielectricparametersweredeconvolutedusingGaussianfitmulti-peaksshowedthattwotypicalphasetransitionswerediscovered.ThefirstpeakistheAFE-FEphasetransitionandthesecondpeakistheFE-PEphasetransitionwhichhasbeenverifiedbyC-Vtests.Theresultsshowthat:thephasetransitionsofAFE-FEandFE-PEwereexistedinantiferroelectricfil