数字干涉测量原理及应用.PDFVIP

1. 2. 3. 2.1 Twyman-GreenT G T G 1.1[1, 2, 3, 4, 5] M1 (Reference) L1 BS He-Ne Laser M2 (Measure) Collimater L2 ΔL CCD 1.1: T—G L1 z U = A exp(ikz) (1.1) Ak = 2π/λλBS Beam splitter M1 UR UR = AR exp[iΦR (zR )] (1.2) ARΦR (zR )zR M2 UT UT = AT exp[iΦT (zT )] (1.3) AT ΦT (zT )zT BS I (x, y) I (x, y) = U · U ∗ = (UT + UR ) · (U ∗ + U ∗ ) (1.4) T R 1 U = U + U ,U ∗ U ∗ U ∗ U U U M M 2θ T r R T R T 1 2 (1.2)(1.3)(1.4)θsin θ ∼ θ I (x, y) = 2I0 [1 + cos(2klθ)] (1.5) I0 ll = ZR − ZT (1.5)lθθ 1.2 λ l = N (1.6) 2 N (1.6) Δl1.1BS L2 [1] N = 1He-Ne 632.5nm Δl ≈ 0.3μmN 0.3 1/10Δl = 0.03μm I (x, y) 0 l 1.2: 2.2 —[1, 2, 3]