铌酸锂相位调制器关键技术的研究-光学工程专业论文.docx

目录目 录第一章绪论....................................................................................................................11.1课题背景.........................................................................................................11.2铌酸锂电光调制器研究进展.........................................................................31.3本论文的任务.................................................................................................5第二章电光相位调制器的基础理论............................................................................62.1铌酸锂晶体特性...............................................................................................62.1.1铌酸锂的晶体结构........................................................................62.1.2铌酸锂晶体的基本热学性质........................................................72.2电光相位调制的基本原理...............................................................................82.3 单模光纤和光波导的耦合..............................................................................112.3.1 单模光纤的模场分布...................................................................112.3.2单模条形波导的传播模式..........................................................132.3.3光纤和波导的耦合......................................................................162.4器件可靠性理论.............................................................................................162.4.1芯片剪切强度的可靠性..............................................................172.4.2气密性的可靠性..........................................................................172.4.3内部水汽含量可靠性..................................................................182.4.4 ESD（静电放电）的可靠性18第三章铌酸锂相位调制器的设计与制作..................................................................203.1质子交换法.....................................................................................................203.1.1质子交换法概述..........................................................................203.1.2质子交换基本理论......................................................................213.1.3 质子交换LiNbO3晶体波导的结构24