基于奥林巴斯protech2.5d软件平台的canon光刻机线宽优化-line width optimization of canon lithography machine based on olympus protect 2.5 d software platform.docxVIP

3.2.2 稳定能量下的参数调整.................................................................................... 373.2.3 不同光强、能量条件下曝光效果分析............................................................ 393.2.4 不同光强条件下的大样本量实验.................................................................... 423.2.5 不同对位间隙设定的影响................................................................................ 47第四章 线宽和套刻系统性控制的实现 .......................................................................524.1 KLA CDSEM 简介 524.2 制造执行系统 .......................................................................................................... 554.3 先进过程控制 .......................................................................................................... 564.3.1 常用的先进过程控制技术................................................................................ 574.3.2 半导体制造中的先进过程控制........................................................................ 57APC FOR PHOTO 简介 58PE KeyIn58PE Function59Report594.5 如何使用 APC FOR PHOTO 实现对线宽的系统性控制 604.5.1 控制目标............................................................................................................ 604.5.2 控制架构............................................................................................................ 604.5.3 运算法则............................................................................................................ 61APC for Photo 的运行流程62APC 应用举例624.6 如何使用 APC FOR PHOTO 实现对套刻的系统性控制 634.6.1 控制目标............................................................................................................ 634.6.2 控制架构............................................................................................................ 634.6.3 实例说明............................................................................................................ 64第五章 结论 ...................................................................................................................65致谢 .....................................................................