基于标准cmos工艺的si-leds及其构成的光互连系统研究-research on si - leds based on standard cmos technology and its optical interconnection system.docxVIP

device designed above, a novel mixed optical interconnection system that consist of the monocrystalline Si-LEDs and polysilicon PIN-LEDs are studied. In this work we made an attempt for the monolithic integrated technology of silicon-based light source, optical waveguide and silicon detector which are compatible with standard CMOS process.In summary, research on the Si-based OEICs offers great opportunities as well as great challenges. Its realization is expected not only to solve the “bottleneck” of conventional electrical connection, but also has great significance in all optical system chip.KEY WORDS： Standard complementary metal-oxide-semiconductor (CMOS)process; Optical power density (OPD); Optical interconnects; Si-based light emitting devices (Si-LEDs); Silicon-based optoelectronic integrated circuits (OEIC); Forward injection p+-n junction.目录第一章绪论................................................................................................................11.1论文的研究背景及意义....................................................................11.2论文的研究内容及主要创新点........................................................21.3本论文的组织结构............................................................................3第二章硅基发光的研究进展....................................................................................52.1半导体发光概述................................................................................52.1.1 半导体发光的物理基础 .............................................................52.1.2 发光效率 .....................................................................................72.1.3 光电转化可逆性原理 .................................................................92.2硅基发光综述..................................................................................102.2.1 硅材料发光特性 .......................................................................102.2.2 硅基光源的研究进展 ...............................................................122.3CMOS 型 SI-LEDS 的研究进展 132.4本章小结................................