CH03 3.0 Fringe Analysis Methods For Static Interferograms 光学检测幻灯片课件.pptVIP

CH03 3.0 Fringe Analysis Methods For Static Interferograms 光学检测幻灯片课件.ppt

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CH03 3.0 Fringe Analysis Methods For Static Interferograms 光学检测幻灯片课件.ppt

3.0 Fringe Analysis Methods For Static Interferograms;3.1 Polynomial Fitting Methods;If the optical surface is smooth and continuous, its deviation to the reference surface can be expressed in the form of linear combination of Zernike polynomials.;The points located at the center of a bright or dark fringe have integer order.;For N points, we have N equations. A1,……………………..Ak;Zernike polynomials are orthogonal over a continuous data set inside unit circle, but not a discrete data set. Our goal is to find a set of polynomials which is orthogonal over discrete points within an unit circle.;Steps to do:;3.2 Fourier Transform Method;In most cases Io(x, y), Ic(x,y) and ?(x, y) vary slowly compared to the variation introduced by the spatial carrier frequency f0.;Since the spatial variations of Io(x, y), Ic(x,y) and ?(x, y) are slow compared with the spatial frequency f0, the Fourier spectra of Equation (2) is separated by the carrier frequency f0. ;Steps to do:;If the band width of G0(fx,0) is 2f1 and the band width of GC(fx,0) is 2f2, to separate the Fourier spectra without losing the information contained in GC(fx,0): f1+f2?f0;It is hard to give an exact f0, a feasible way to do this is that measuring several times with different f0, when the test result doesn’t change with f0 the result is accepted. If the phase function has some high frequency components, because of the Fourier Transform properties, the band of the spectra will be widen and can not be properly separated with reasonable f0, some information will be lost. Advantages: Do not need to find fringe centers One frame can be grabbed very fast, avoid vibrations.;3.3 Optimization Method;If the optical surface is smooth and continuous, its deviation to the reference surface can be expressed in the form of linear combination of Zernike polynomials.;Our goal is to find out A1, A2,…..Ak to make the difference between IC and In become minimum at each selected point (ri, ?i), that is:;Damp Least Squares Method( (

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