Gas Detection Strategies - SESHA：气体检测策略-色纱.pptVIP

Gas Detection Strategies Overview of Selection Criteria for Gas Detection Systems How do I choose? Which Gas Detection Technology is best for my application? What criteria is important to me? How do I understand the specifications that are given to me? Which Technology is Best for my Application? Understand that there are different technologies for most gases Understand that some technologies do not work for certain gases Examples: FTIR cannot detect diatomic molecules (Cl2, Br2) Example: Paper Tape (Chemcassettes) cannot detect Hydrogen Which Technology is Best for my Application? Develop a selection criteria and use it to evaluate the different technologies Make sure you are comparing apples with apples – many suppliers call data by the same name but calculate it differently Developing Selection Criteria Questions to Consider Before We Begin Review Fab Monitoring Locations -- Tool Exhaust -- Fab Ambient Air -- VMB -- Gas Cabinet -- Subfab Ambient -- Pump Housings -- Process Protection Applications Do You Want the Same Criteria for Each Location? Developing Selection Criteria What is Important for the Application (Usually Same List / Sometimes Different Priorities) Specificity Speed of Response Lower Detectable Limits Reliability Accuracy Cost of Ownership Initial Cost of Capital Investment Developing Selection Criteria Establish a Spreadsheet for each Monitoring Application (Ambient, Exhaust, Gas Cabinet, etc.) List your Criteria Rank your Criteria Sort your list by Rank Evaluate each technology by the criteria Choose the technology that best meets your needs Developing Selection Criteria Developing Selection Criteria Developing Selection Critera You May Ask Yourself……. Specificity? Speed of Response? Reliability? Accuracy? Lower Detectible Limits? What Does Do These Terms Really Mean to Gas Detection? Specificity No cross sensitivities to other substances commonly used in a semiconductor fab Review manufacturer data – this information shou