ismi半导体行业关键环境绩效指标.pdf

Acceleratingg Sustainable Manufacturingg ISMI Development of Key Environmental Performance Indicators ffor ththe SSemiicondducttor IInddusttry Steve Trammell steve.trammell@ Laurie Beu laurielaurie.beu@ismibeu@org Copyright ©2010 Advanced Materials Research Center, AMRC, International SEMATECH Manufacturing Initiative, and ISMI are servicemarks of SEMATECH, and the SEMATECH logo are registered servicemarks of SEMATECH, Inc. All other servicemarks and trademarks are the property of their respective owners. AcknowledgmentsAcknowledgments • The authors would like to acknowledge the members of the ISMI Key Environmental Performance Indicators Working Group without whom this projjectt wouldld nott hhave bbeen possiblible: – Silke Hermanns, Reed Content – Global Foundries – Kanchana Sonti – HP – RRanddallll DDuggan – IBMIBM – David Harman, Tim Higgs – Intel – Don Westmoreland – Micron – RichRich BanksBanks – NationalNational SemiconductorSemiconductor – Kasai Hideo – Panasonic – Nakagawa Shinya – Renesas – SaSangsugsun Haa – SaSamsusungg – Tim Yeakley – Texas Instruments – Hiromi Yajima – Toshiba – C.Y. Huang – TSMC – H.R. Lai – UMC – Martha Montemayor-Rapier – Zander Inc. 2 OutlineOutline • KEPIsKEPIs – WhatWhat andand Why?Why? • KEPI Drivers • ISMI Approach to KEPI Development • Semiconductor KEPIs • Summary 3 What are KEPIs Why DDevellop ThThem?? • KEPIKEPI DefinedDefined:: AA setset ofof environmentalenvironmental performance indicators that quantify the KEY environmental impacts associated with the manuff