微纳米尺度金属薄膜拉伸分叉问题的分析-analysis of stretching bifurcation of micro-nano scale metal films.docxVIP

ABSTRACTMicro-nanoscalemetallicfilmhasbeenwidelyusedintheelectronicinformation,energy,biological,medicalandotherfields.Thinfilmintheprocessofworkoftensubjecttensileload.Whentheloadreachesacertainvalue,membranestructurebifurcatesinstabilityunderasmallincrement.Thenthefilmwillappearmicro-crackandrupture.Duetothebifurcationonthemembranewilldirectlyaffectthereliabilityandservicelifeofthecomponents,soitisveryimportanttodeterminethebifurcationpointofmicro-nanoscalemetallicfilmanddoresearchonthisproblem.Themainpurposeofthispaperistostudyonthebifurcationproblemofmicro-nanoscalemetallicfilmundertensionbyusingelectricalresistanceproperty.Atheoreticalanalysisofresistanceisgivenbasedonthetransformationofthinfilmundertension.Weestablishedtherelationofchangingresistanceamongthestraininanelasticdeformationstage,evenplasticdeformationstage,andlocalizationstage.Theresistancechangemeasurementsystemandatensileloadingdeviceaimingatthefilm/substratestructureareindependentlydesignedanddeveloped,whichcouldstretchthefilm/substratestructureinsituathighprecisionandgetthereal-timeobservationofthemorphologyandchangingprocessofmetallicfilm’ssurfacewithhighmagnificationopticalmicroscope.Theexperimentalinvestigationfocusesonthecopperfilmdepositedonpolyimidesubstrate.Thedeformationandfailureprocessofthecopperfilmwasanalyzedanddiscussed.Wefindthatthebifurcationpointisnotsingle,anditmaybeexistinginvariouspositions.Theappearanceofmicro-cracksinfilm’ssurfaceisperiodic.Themicro-crackskeepparallelandperpendiculartothedirectionofstretching.Therelationshipbetweenthechangeofresistanceandstrainwasobtainedbymeasuringthechangeofresistanceofthecopperfilmunderuniaxialtensileloading.Therelationcurveobtainedwascomparedwiththeresultofthetheorydeductiontodeterminethebifurcationpointofthecopperfilmundertension.Theresultsshowthatpolyimide-supportedcopperfilmruptureswhentheoverallstrainjustexceedsthebifurcateinitiationstrain,whichisnotfarbeyonditselasticlimit.Intheprocess,therearelittleplasticdeformationandlocalizatio