【毕业论文】离子轰击对316L不锈钢表面Al2O3涂层的影响.docVIP

编号 XXX大学 毕业论文 题 目 离子轰击对316L不锈钢表面Al2O3涂层的影响XXX大学 本科毕业设计（论文）诚信承诺书 本人郑重声明：所呈交的毕业设计（论文）（题目： ）是本人在导师的指导下独立进行研究所取得的成果。尽本人所知，除了毕业设计（论文）中特别加以标注引用的内容外，本毕业设计（论文）不包含任何其他个人或集体已经发表或撰写的成果作品。 作者签名： 年 月 日 （学号）： 离子轰击对316L不锈钢表面Al2O3涂层的影响 摘 要 氚渗透是聚变堆生产和使用的重要研究领域在低渗透率不锈钢表面陶瓷防氚渗透层国际上公认的解决方案，既可保证材料结构性能，同时抑制氚渗透本文利用双层辉光等离子渗磁控溅射α-Al2O3涂层，并重点研究离子轰击分别对Al-Y涂层及Al-Y氧化层的影响。本课题分别采用磁控溅射技术和双辉等离子渗金属技术制备Al-Y涂层，然后分别进行等离子氧化和热氧化。再利用X射线衍射仪（XRD）、扫描电子显微镜（SEM）对氧化涂层的组织结构进行观察分析，并进行结合力、耐腐蚀性的测试。经过分析对比数据后得出主要结论如下： 1、离子轰击可促进涂层中稳态α-Al2O3相的生成，使涂层表面组织更加均匀、致密。α-Al2O3相的含量 关键词：双辉等离子渗金属，磁控溅射，Al-Y涂层，热氧化，等离子氧化 The influence of ion bombardment on Al2O3 coating of 316L stainless steel surface Abstract Tritium permeation loss in the production and use process of fusion reactor is an important issue. The preparation of thin layers of ceramic material on stainless steels with low diffusivity (so-called penetration barriers) seems to be the most practical method to reduce or hinder the permeation of tritium through the substrates. Therefore, this paper puts forward that using double glow plasma technique and magnetron sputtering technique to prepare α-Al2O3 coatings. The research was focused on the impact of ion bombardment of the Al - Y coating and the Al - Y oxide layer. Then using X-ray diffraction (XRD), scanning electron microscopy (SEM) to observe and analyze the organizational structure of the oxide coating. Then make experiments to test the adhesion, corrosion resistance of the specimen. To analyse the data of the tests, The main conclusions were drawn as follows: 1、Ion bombardment can promote the formation of stable-state α-Al2O3 phase and make the surface morphology more uniform and dense. 2、Ion bombardment can promote the oxidation of the coating, enhance corrosion resistance of the coating and the bonding force with the substrate. 3、Suitable addition of Y can promote the formation of stable-state α-Al2O3 phase. Key