具残留应力薄膜结构的热弹声波波传ThermalAcousticWave.PDFVIP

留力 Thermal Acoustic Wave Propagation in Stressed Thin-film Structures Student Huan-Chen Chang Advisor Dr. Ching-Chung Yin 立 論 A Thesis Submitted to Department of Mechanical Engineering College of Engineering National Chiao Tung University in partial Fulfillment of the Requirements for the Degree of Master in Mechanical Engineering September 2006 Hsinchu, Taiwan, Republic of China 年 留力 立 量 料理 理論 狀留力理論 料 料 料 不兩數異 留力度雷 立料留力 數度兩留 力數不 藍 數數 留力 i Thermal Acoustic Wave Propagation in Stressed Thin-film Structures Student Huan-Chen Chang Advisor Dr. Ching-Chung Yin Deparment of Mechanical Engineering National Chiao Tung University ABSTRACT Photoacoustic effect is used to measure optical, thermal physical properties of materials and to characterize the subsurface properties of microstructures. This thesis presents a formulation for thermal acoustic wave propagation in stressed layered media based on the acoustoelasticity for bulk acoustic waves in order to simulate photoacoustic effect of thin-film materials. Thin-film materials are broadly used in many applications of semiconductor and electro-optic devices. Due to misfit between