压缩空气系统的设计.docVIP

压缩空气系统的设计 　　摘要：一个好的压缩空气系统设计对于半导体芯片厂是非常重要的。这篇论文主要是介绍压缩空气系统的设计思路。 本文主要讲述一下内容: 总体目标、气体要求、扩充策略、维护保养、空气流通、气体品质与压力、系统中的压力损失、系统框架等。 　　关键字：压缩空气；压力；容量；质量 　　 　　Abstract: A well designed compressed air system is very important for a semiconductor wafer Fab operation. This paper gave the designer of compressed air system design. The following topics covered in this paper: Overall objective, Air demand, Expansion strategy, Maintenance considerations, Ventilation, Air quality, Air pressure, Pressure Loss in Air System, Information needed by supplier, Air Receiver Sizing, System Layout. Even you are des