高真空阀流量特性的分析-机械电子工程专业论文.docxVIP

哈尔滨工业大学工学硕士学位论文 哈尔滨工业大学工学硕士学位论文 Abstract The application region of vacuum system in heavy industry and light industry is more and more wide, and the requirements on performance of vacuum system become more high. So there is a need to study deeply about the flow characteristics of vacuum components, especially that of high vacuum valve. Nevertheless, there have been little researches on flow characteristics of vacuum components with complex structure, and many relative theories have not been perfected. Therefore, the conductance of high vacuum valve is required to be obtained through relevant study. As a result, the valve can work best in the vacuum system. This paper takes high vacuum valves used in vacuum system as research object. First of all, the conductance value of simplified model of high vacuum valve, right-angle elbow pipe, is calculated both in air flow and molecular flow condition according to existing theoretical formula. In air flow condition, the simulation model is established using FLUENT software on the basis of computational fluid dynamics. The conductance information varying with pressure is acquired and conductance curve for a same valve with different opening of valve core. In molecular flow regime, the transmission probability and conductance curve of high vacuum valve with different opening of valve core is calculated using MATLAB software based on Test Particle Monte Carlo Method, and the calculated results meet well with the reference value. In transitional flow regime, the conductance is received by exponential fitting of conductance value got in air flow and molecular flow regime. Thus conductance curve of high vacuum valve in the whole pressure range can be obtained. Due to restrictions in terms of experimental equipment, it is difficult to validate simulation results through real experiment. Therefore this paper would compare the simulation results with existing experimental results of flow characteristics for the same model. Then the