反射率测量XRR简介-医学课件.pptVIP

* G?bel Mirror原理 GM镜将大约≈0.35°的发散光聚焦成1.2 mm的平行光 (60-mm mirror) 强度109 cps 背底低，只有Kα Parabola X-ray source Goebel mirror Sample * Handling the high flux: Rotary Absorber自动旋转吸收片 Scintillation counters linear up to 2 x 105 cps 10,000 times more intensity from the tube side 4-position wheel with places for 4 different absorber foils standard absorption factors: 1 - ~10 - ~100 - ~10000 Rotary absorber * 标准的XRR 测量设置 可以通过改变狭缝的宽度改变仪器的分辨率 狭缝通常0.1 – 0.2 mm 强度 ≈ 2x108 cps * 不同狭缝宽度的XRR测量数据 with 0.6 mm slit with 0.1 mm slit ~ 5 min ~ 6.5 h * 超薄材料的 XRR测量配置 入射光路狭缝很宽 长索拉的角度分辨率~0.1° 强度 ≈ 8x108 cps * 反射率测量实例 LaZrO on Si Si (111) 6.7 nm LaZrO * 使用分析晶体的XRR 测量配置 分析晶体将x射线单色化，同时可以接收全部的反射束，无需探测器狭缝 强度 ≈ 3x107 cps (for a 3-bounce analyzer) 分析晶体提高了2theta 的角度分辨率 1-bounce Ge(220) 3-bounce Ge(220) * 后置分析晶体: 1-bounce Ge(220s) 3-bounce Ge(220s) 前置四晶单色器 单色器提供高度准直和单色化的入射线束 分析晶体进一步提高仪器分辨率 强度 ≈ 105 - 106 cps 超厚材料的 XRR测量配置 * Si 1014 nm SiO2:H 反射率测量实例 SiO2 on Si * ?根据不同的样品，我们选择不同的仪器分辨率以期获得最佳的数据质量“ * 入射光路的光学器件选择-只有GM Rotary absorber X-ray tube Goebel mirror slit-holder * 使用双晶单色器进一步提高分辨率 Rotary absorber Goebel mirror slit-holder X-ray tube 2-bounce Ge(220a) monochromator * Rotary absorber Goebel mirror slit-holder X-ray tube 4-bounce Ge(220s) monochromator 使用四晶单色器更进一步提高分辨率 探测器端的分辨率选择Pathfinder 07.06.2011 * 光路自动切换 happy happy happy happy happy happy happy happy happy happy happy happy * micromachining technology Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. happy * * PC Guide: GMR heads are comprised of four layers of thin material sandwiched together into a single structure Free Layer: This is the sensing layer, made of a nickel-iron alloy, and is passed over the surface of the data bits to be read. As its name implies, it is free to rotate in response to the magnetic patterns on the disk. Spacer: This layer is nonmagnetic, typic