二维精密运动平台的轮廓伺服控制器设计-机械电子工程专业论文.docxVIP

Classified Index：TH-39 U.D.C：621 Dissertation for the Master Degree in Engineering DESIGN OF CONTOUR SERVO CONTROLLER FOR THE TWO-DIMENSIONAL PRECISE WORKBENCH Candidate: Tian Naiqiang Supervisor: Prof. Gai Yuxian Academic Degree Applied for: Master of Engineering Speciality： Mechatronics Engineering Affiliation： School of Naval Architecture Date of Defence： June, 2015 Degree-Conferring-Institution: Harbin Institute of Technology 摘 要 精密运动控制技术在超精密机床、精密医疗器械、精密测量仪器中应用广 泛。为了提高系统的运动精度，本文主要以滚珠丝杠驱动的精密二维运动平台 为应用背景，对其单轴伺服控制器及轮廓伺服控制器进行了系统设计与性能分 析，从伺服算法层面上来提高系统的运动精度。 首先，本文采用理论推导与 Matlab 数值仿真的方法，对单轴全闭环控制模 型进行了仿真建模，对单轴进给系统进行了三环仿真，在运动控制器中闭合位 置环，在驱动器中闭合环速度环和电流环。为了简化控制模型，本文将速度控 制单元简化为一阶惯性环节，完成了对单轴伺服全闭环控制系统的建模。 然后，本文采用非线性 PID 算法对单轴伺服控制系统的位置环进行了单独 设计，提高了控制系统的定位精度。基于复合控制原理，设计了速度前馈和干 扰观测器，提高了系统的速度跟随性能，减小了系统的稳态跟随误差，也进一 步提高了系统的鲁棒性。在此基础上，本文采用变增益的交叉耦合控制算法设 计了二维工作台的轮廓控制器，将开环的轮廓控制变为闭环的轮廓轨迹控制， 进一步提高了二维工作台的轮廓轨迹精度。 最后，本文基于 Turbo PMAC 运动控制卡作搭建了实验平台，检测了系统 的开环特性，对比了半闭环与全闭环控制时的系统稳态误差，然后实验验证了 给系统加入速度前馈能够有效减小系统的跟随误差，编辑了非线性 PID 控制算 法，通过对比系统的稳态误差、跟随性能、及响应速率，实验验证了非线性 PID 控制算法的有效性。 关键词：精密运动控制；全闭环；非线性 PID；轮廓控制 Abstract Abstract Precision motion control technology is widely used in ultra-precision machine tools, medical instruments. In order to improve the positioning precision of the system, this paper mainly took the two-dimensional positioning platform driven by ball screw as application background, and then designed and analyzed the single axis servo controller and contour servo controller for the system. First of all, based on the theoretical derivation and numerical simulation by Matlab, position loop was closed in the PMAC controller, speed loop and current loop were closed in the drive, in order to simplify the model，speed control unit is simplified to First-order inertia link, and then completed a single axis servo simulation model. Second, this paper used nonlinear PID algorithm to design the position loop of single axis servo control system, improved the positioning precision of the