半导体设备的人机界面semi e95标准.pdfVIP

SEMI E95-1101 (Reapproved 0307) SPECIFICATION FOR HUMAN INTERFACE FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT This standard was technically approved by the global Information Control Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on November 21, 2006. It was available at in February 2007 and on CD-ROM in March 2007. Originally published February 2000; previously published November 2001. 1 Purpose 1.1 This standard addresses the area of processin